Micro Vibration Measurement & Monitoring Services
Since its founding in 2005, Well-Link has been dedicated to the research, development, and design of products related to seismic resistance, vibration control, and isolation, aiming to enhance structural safety and reliability. With the advancement of technology, users have higher demands on the environment, and the sources of vibration that need to be suppressed extend beyond just earthquakes:
- in the evolution of semiconductor processes, the fault tolerance of chip manufacturing has become even lower;
- in the manufacturing industry, the precision required for products has significantly increased compared to the past;
- with the growing prevalence of minimally invasive surgeries, the disturbances in operating room environments need to be reduced to facilitate medical procedures for healthcare professionals.
Therefore, Well-Link is committed to developing services for micro vibration measurement and monitoring. We have invested in technical personnel to participate in relevant certification training, ensuring that we provide customers with reliable data results with the utmost professionalism. Through these services, we offer customers a more diverse range of product options.
Description
Well-Link provides micro vibration measurement and monitoring services based on existing VC vibration curve recommendations to suggest reference values. This service effectively assists customers in assessing the vibration levels in their usage environment, determining whether the surrounding environment meets the requirements for their operations. An example measurement case is illustrated in the diagram below.
Below are the applicable areas corresponding to the VC-Curve levels (for reference):
| Vibration Level | Corresponding Environment Description |
| Workshop (ISO) | Noticeable vibrations, suitable for general work areas and non-sensitive zones. |
| Office (ISO) | Perceptible vibrations, suitable for offices and non-sensitive areas. |
| Residential Day (ISO) | Minimal vibration perception, generally suitable for bedrooms/living rooms, most of computer equipments, hospital rehabilitation rooms, semiconductor probe testing equipment, and microscopes less than 40 times magnification. |
| Op. Theatre (ISO) | Undetectable vibrations, generally suitable for operating theaters, low-magnification microscopes (100X), and other low-sensitivity equipment. |
| VC-A | Optical microscopes with magnification up to 400 times can be used in this environment. |
| VC-B | Optical inspection equipment for processes and yellow light process equipment can be applied to this specification. |
| VC-C | This criterion applies to optical microscopes below 1000 times magnification, with good criteria standards for optical inspection equipment with 1μm processes and yellow light process equipment. |
| VC-D | Most of equipments, including electron microscopes (TEM and SEM, as well as E-Beam) systems, require vibration environments within this range to ensure optimal equipment performance. |
| VC-E | This standard is difficult to achieve in most cases and is typically required for systems with laser focus, longer travel, or smaller focal points. |
| VC-F | Applicable to extremely quiet spaces, which are often difficult to achieve, especially in clean rooms. Not recommended as a design standard, only for evaluation purposes. |
There are many potential causes of environmental vibrations. By inspecting the surrounding environment on-site and utilizing data collection through sensing instruments for signal processing and subsequent analysis, we can identify the following causes of environmental vibrations, illustrated with diagrams:
1. Equipment-Induced Environmental Disturbance:
Example 1:
- M represents the weight of the equipment.
- m represents the mass of the rotating unit within the equipment.
- The rotating unit operates according to the motion equation F(t), causing periodic vibrations on the factory floor.
These vibrations are due to the rotational motion of the unit, which induces cyclical forces that transmit through the structure, leading to periodic disturbances in the surrounding environment.
Figure 1: Disturbance Caused by Eccentric Rotating Unit (e.g., Vibrations Generated by a Washing Machine).
2. External Disturbance Leading to Equipment Vibration:
Example 2:
- M represents the mass of the equipment.
- Due to the load F(t) caused by pedestrian loading, the floor experiences vibrations.
- These vibrations are an irregular continuous function resulting in a vertical external force.
The force F(t) can be represented using a finite Fourier series for simplification.
The impact of foot traffic on the floor can cause vibrations that affect the equipment. These vibrations are complex and irregular but can be approximated by a simplified representation using F(t).
Figure 2: Disturbance Caused by Pedestrian Loading Around Equipment.
3. Natural Causes Leading to Vibrations:
- Wind: Strong winds can cause vibrations in structures such as buildings, bridges, and towers.
- Earthquakes: Seismic activity generates ground vibrations that can transmit through structures and equipment.
- Water Flow: Flowing water, especially in large volumes such as rivers or industrial pipelines, can induce vibrations in nearby structures.
These natural sources create varying levels of vibrational disturbances that can affect both the environment and any sensitive equipment within it.
4. Traffic-Induced Vibrations:
- Traffic: Vibrations caused by vehicles passing nearby, including cars, trucks, and trains, can induce noticeable vibrations in nearby structures.
- Road Surface: The condition of the road surface (e.g., potholes, uneven pavement) can amplify the vibrations caused by passing vehicles.
- Traffic Volume: Higher traffic volumes can result in more significant and continuous vibrations.
These vibrations from traffic can affect the stability and functionality of sensitive equipment and structures.
Well-Link has developed the following product types for vibration measurement services:
- Micro Vibration Measurement Applications
- Micro Vibration Field Measurement
- Micro Vibration Long-Term Monitoring
The specifications of the instruments used for measurement are as follows:
- Measurement Range: 0.5 g (peak)
- Frequency Response: 0.10 – 300 Hz (±10%)
- Broadband Noise：0.5 μg
- 24-bit resolution
If you have any of the above service needs, please feel free to contact us.
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